Electronics-Related Products
Based on our technology and sales network, we provide high-performance products for the electronics industry and others, mainly in the semiconductor and LCD related industries.
High-performance O-ring
Matsumura Oil has a rich experience of over 35 years, we will provide your satisfaction material seal to every needs.
[Perfluoro Features]
BARREL PERFLUORO O-rings promise long-term good sealing performance in semiconductor and LCD manufacturing equipment and all industries.
notice)Never use “Barrel Perfluoro” O-rings for transplants, implants, and other medical operations. Because there is risk that using “Barrel Perfluoro” O-rings can lead to serious loss, we recommend conducting a compatibility test before use.
BARREL PERFLUORO 75B | Excellent resistance to gas and solvents. Better stability than other types when subjected to physical stress such as contact etc. Mainly for use in wet etching, outside gas line of process chamber, and CVD equipment. Resistance to Amine and steam. Black color type | Physical properties① ![]() |
---|---|---|
BARREL PERFLUORO MPB | Greater elongation, strength, and heat resistance than the 75B. Other features are the same as the 75B. Black color type | Physical properties①![]() |
BARREL PERFLUORO ZT | Greater heat resistance, tensile strength than the 75B. Excellent resistance to steam and boiling water. Black color type | Physical properties①![]() |
BARREL PERFLUORO PHT | Can be used in high temperature environments such as boiling water, high temperature steam. Can endure high temperatures of up to 300℃. Good outgassing. Excellent resistance to Amine and NMP Black color type | Physical properties①![]() |
BARREL PERFLUORO MP300B | Can endure high temperatures of up to 300℃. Good compression set. Good outgassing. Not used for boiling, high temperature steam and amine. Black color type | Physical properties①![]() |
BARREL PERFLUORO 70W | Occurrence far fewer particles than the Black type placed under the plasma environment. Best used at temperatures less than 200℃. Mainly used for dry etching chamber. White color type | Physical properties② ![]() |
BARREL PERFLUORO 55C | Non-particle grade (contains no filler) Due to its low hardness, it may deform when used at high temperatures. Excellent resistance to O2 gas. Suitable for fixed areas, such as View port. Clear color type | Physical properties②![]() |
BARREL PERFLUORO 70P | Enhanced hardness while retaining the non-particle capabilities of the 55C. Ideally suited for systems with high gas levels, such as dry etching in high integrated circuits that are particularly unresistant to particles, as well as etching and ashing in LCD equipment. Like the 55C, it contains no metals, thus it is non-corrosive. Especially effective when used in micro wave process. White color type | Physical properties②![]() |
BARREL PERFLUORO MSP2 | The same characteristics as 70P. Also in the PCVD process, the weight loss is the least, especially resistant to NF3 and O2. White color type | Physical properties②![]() |
BARREL PERFLUORO SPZ | The same characteristics as MSP2 Superior physical characteristics make it ideally suited for dynamic seal. White color type | Physical properties②![]() |
BARREL PERFLUORO SPα | The same characteristics as SPZ. SPα has hardness 70°. White color type | Physical properties②![]() |
[NON-Perfluoro material Features]
Although it is a non-perfluoro material, Achieve the best performance wherever use it.
notice)Never use High performance O-rings for transplants, implants, and other medical operations. Because there is risk that using "FLUORO EXCEL series etc." O-rings can lead to serious loss, we recommend conducting a compatibility test before use.
EXCEL 10 | Provides the greatest stability for O2 of all Non-perfluoro products. It contains no carbon black, thus is low particles. | Physical properties③![]() |
---|---|---|
DIRAS | More excellent resistant to oxygen and fluorine gas in the Non-perfluoro type category. Superior physical characteristics make it ideally suited for dynamic seal. It contains no metals etc. thus it is low particles. | Physical properties③![]() |
FLUORO EXCEL 403 | Non-adhesive type that incorporates a special filler. Maintains about 1/10 of particle in dry air environment compared to FKM-70. | Physical properties④![]() |
FLUORO EXCEL HT | Greater heat resistance than ordinary fluoro rubber. (can be used continuously at about 275 ℃) Oil resistance, chemical resistance, strength substantially are the same as FKM-70. | Physical properties④![]() |
FLUORO EXCEL B | Excellent resistance to steam and boiling water. Excellent resistance to solvents (mainly inorganic acids). (Cannot be used for amine liquid systems) Better mechanical properties than FKM-70. | Physical properties④![]() |
FLUORO EXCEL ESD | Although it is conductive (108 to 104), please use it for the purpose of antistatic (antistatic). (Excessive current may cause a fire) Other characteristics are the same as FKM. | Physical properties④![]() |
EXCEL C21 | Among Non-perfluoro category, amine resistance is most excellent. Best as a sealing material for resist stripping equipment in wet processes. | Physical properties⑤ ![]() |
Other products | FKM-70,EPDM,NBR, Silicon,Fluoro-silicon,etc. | - |
High-performance cleaning solution
Revolutionary Technique for Deposit Treatments OTS-2 | Usages This product was developed to employ a chemical stripper to easily remove the various oxide films and rust from the stainless steel, solidified Si and resin components of equipment used to manufacture a variety of devices, such as LEDs and LiB. By removing films more safely and easily than conventional techniques, this product will help improve productivity and reduce on-site costs. | Product Description⑥ ![]() |
---|
High-performance fluorine oil / grease
[High-performance fluorine oil]
Perfluoropolyether features extremely high thermal and chemical stability as well as inactivity
notice) Please make your own judgment when adopting and using the product. Except for guaranteeing that the delivered product conforms to the standard specifications, we do not take any warranty or responsibility, including express and implied, including commerciality and suitability for a specific purpose.
DAIKIN INDUSTRIES, LTD., | DEMNUMTM | DEMNAMTM is a perfluoropolyether oil. It is extremely stable thermally and chemically, and is especially suitable as a lubricant that requires heat resistance and cleanliness. It is used for semiconductors, aerospace, electronics, automobiles, OA, etc. |
---|
[High-performance fluorine grease] Each manufacturer's product can be handled.
High-performance engineering plastic
We process and sell for semiconductor / liquid crystal manufacturing equipment and parts of various materials used in the manufacturing process.
HaROT J001 | Matsumura oil's original super engineering plastic resin, which is hard, supple, has a low coefficient of friction, and has wear resistance. Many achievements, CMP process retainer ring, DRY process plasma resistant parts, WET process transfer roller, etc. | Physical properties⑦![]() |
---|---|---|
Engineering plastic | PA, POM, PC, PET, PBT, etc. | - |
Super Engineering plastic | PSU, PEI, PES, PPS, PEEK, PAI, PBI, PI, etc. | - |
Other electronic products
Fine ceramics products | We sell fine ceramics products used in semiconductor and liquid crystal manufacturing equipment. |
---|---|
Interlayer plate for multilayer hot press "DP2 SUS Plate" | We use high-performance stainless steel and sell it as an intermediate plate for printed circuit board hot presses. |